INESC Microsistemas e Nanotecnologia


INESC Microsistemas e Nanotecnologia

INESC Microsistemas e Nanotecnologias (INESC-MN), a private non-profit R&D institute, has a class 100/10 clean room with optical and electron beam lithography, which enables the manufacture of nanoscale devices. INESC-MN’s activity is dedicated to cutting-edge research and development in strategic technological areas of micro- and nanotechnologies, as well as the application of these technologies in electronic, biological and biomedical devices. 

INESC-MN supplies technology to Portuguese industry and international organisations through collaborative research, contract research, prototyping and consultancy. 

In this Agenda, INESC-MN will apply its know-how to the industrial implementation of microfabrication for the development of electro-optical chips and the industrialisation of processes for integrated optical circuits.

what they are

developing as part of the Microelectronics Agenda

– Packaging of PICs using INESC-MN’s rapid prototyping platform for microfabricated elements

– It aims to develop scale microfabrication protocols and a platform for microfabricating packaging structures using thin film deposition techniques and lithographic processing.

– Consumables for microfabrication of supports for optical components, including silicon wafers, chemicals and process gases, grids and targets for the thin film deposition system.

– Microfabrication and microstructure processing equipment: mask aligner, etching system with end point detector, wafer cassette oven and automatic coating/revealing system for wafers. Equipment for placing chips after sawing.

– Clean room for a production area of microfabricated supports for PIC, including the wetbench for batch KOH wet etch processes of various wafers.

– Microstructure process quality control equipment: electric wafer tester with probe card and profilometer.


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